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1

Piezoelectric properties of polycrystalline AlN thin films for MEMS application

K. Tonisch, V. Cimalla, Ch. Foerster, H. Romanus, O. Ambacher, D. Dontsov

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 427 KB

english, 2006

2

Performance of silicon strip detectors with 50 and 100 μm strip distance

H. Boettcher, A. Donat, R. Leiste, G. Motz, U. Roeser, M. Sachwitz, T. Thon, F. Tonisch, K. Truetzschler, R. Wischnewski, L.S. Barabasch, I.A. Golutvin

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1984

Language:

english

File:

PDF, 970 KB

english, 1984

3

AlGaN/GaN-heterostructures on (111) 3C-SiC/Si pseudo substrates for high frequency applications

K. Tonisch, W. Jatal, F. Niebelschuetz, H. Romanus, U. Baumann, F. Schwierz, J. Pezoldt

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 668 KB

english, 2011

4

AlGaN/GaN Based HEMTs on SiC/Si-Substrates: Influences on High Frequency Performance

Jatal, Wael, Tonisch, Katja, Baumann, Uwe, Schwierz, Frank, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 274 KB

english, 2013

5

Side Gate Graphene and AlGaN/GaN Unipolar Nanoelectronic Devices

Göckeritz, Robert, Tonisch, Katja, Jatal, Wael, Hiller, Lars, Schwierz, Frank, Pezoldt, Jörg

Journal:

Advanced Materials Research

Year:

2011

Language:

english

File:

PDF, 1.10 MB

english, 2011

6

Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended EulerâBernoulli Beam Theory

Krey, Maximilian, HÃ¤hnlein, Bernd, Tonisch, Katja, Krischok, Stefan, TÃ¶pfer, Hannes

Journal:

Year:

2020

Language:

english

File:

PDF, 10.89 MB

english, 2020

7

Impact of Device Technology Processes on the Surface Properties and Biocompatibility of Group III Nitride Based Sensors

I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J. A. Schaefer, M. Gebinoga, A. Schober, T. Friedrich, O. Ambacher

Journal:

Materialwissenschaft und Werkstofftechnik

Year:

2006

Language:

english

File:

PDF, 231 KB

english, 2006

8

Austrittsarbeitsanalyse von GaN basierten Lateral Polarity Strukturen durch Auger-Elektronen-Energie-Messungen

M. Niebelschütz, G. Ecke, V. Cimalla, K. Tonisch, O. Ambacher

Journal:

Materialwissenschaft und Werkstofftechnik

Year:

2006

File:

PDF, 166 KB

2006

9

The construction and performance of a large cylindrical wire chamber with cathode readout

K. Deiters, A. Donat, W. Friebel, R. Heller, S. Kirsch, R. Krankenhagen, W. Lange, R. Leiste, W. Lohmann, W. Lustermann, Y. Peng, U. Röser, F. Tonisch, G. Trowitzsch, H. Vogt, M. Wilhelmi

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1992

Language:

english

File:

PDF, 438 KB

english, 1992

10

Beam tests of prototype fiber detectors for the H1 forward proton spectrometer

J. Bähr, K. Hiller, B. Hoffmann, H. Lüdecke, A. Menchikov, R. Nahnhauer, H.E. Roloff, F. Tonisch, R. Völkert

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1996

Language:

english

File:

PDF, 909 KB

english, 1996

11

Waveguide monitors—a new type of beam position monitors for the TTF FEL

U Hahn, T Kamps, R Lorenz, W Riesch, H.J Schreiber, F Tonisch

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2004

Language:

english

File:

PDF, 449 KB

english, 2004

12

Nanowire-based electromechanical biomimetic sensor

K. Tonisch, V. Cimalla, F. Will, F. Weise, M. Stubenrauch, A. Albrecht, M. Hoffmann, O. Ambacher

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2007

Language:

english

File:

PDF, 548 KB

english, 2007

13

Growth of silicon nanowires on UV-structurable glass using self-organized nucleation centres

K. Tonisch, F. Weise, M. Stubenrauch, V. Cimalla, G. Ecke, F. Will, H. Romanus, S. Mrotzek, H. Hofmeister, M. Hoffmann, D. Hülsenberg, O. Ambacher

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2007

Language:

english

File:

PDF, 701 KB

english, 2007

14

AlGaN/GaN biosensor—effect of device processing steps on the surface properties and biocompatibility

I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J.A. Schaefer, M. Gebinoga, A. Schober, T. Friedrich, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2007

Language:

english

File:

PDF, 845 KB

english, 2007

15

Nanoelectromechanical devices for sensing applications

V. Cimalla, F. Niebelschütz, K. Tonisch, Ch. Foerster, K. Brueckner, I. Cimalla, T. Friedrich, J. Pezoldt, R. Stephan, M. Hein, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2007

Language:

english

File:

PDF, 1.73 MB

english, 2007

16

Fabrication of one-dimensional “trenched” GaN nanowires and their interconnections

V. Lebedev, D. Cengher, M. Fischer, K. Tonisch, V. Cimalla, M. Niebelschütz, O. Ambacher

Journal:

physica status solidi (a)

Year:

2007

Language:

english

File:

PDF, 483 KB

english, 2007

17

Optical properties of InN grown on Si(111) substrate

E. Sakalauskas, P. Schley, J. Räthel, T. A. Klar, R. Müller, J. Pezoldt, K. Tonisch, J. Grandal, M. A. Sánchez-García, E. Calleja, A. Vilalta-Clemente, P. Ruterana, R. Goldhahn

Journal:

physica status solidi (a)

Year:

2010

Language:

english

File:

PDF, 312 KB

english, 2010

18

Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications

K. Brueckner, F. Niebelschuetz, K. Tonisch, Ch. Foerster, V. Cimalla, R. Stephan, J. Pezoldt, T. Stauden, O. Ambacher, M. A. Hein

Journal:

physica status solidi (a)

Year:

2011

Language:

english

File:

PDF, 1.38 MB

english, 2011

19

Growth of AlN nanowires by metal organic chemical vapour deposition

V. Cimalla, Ch. Foerster, D. Cengher, K. Tonisch, O. Ambacher

Journal:

physica status solidi (b)

Year:

2006

Language:

english

File:

PDF, 466 KB

english, 2006

20

Elastic properties of nanowires

Claus-Christian Röhlig, Merten Niebelschütz, Klemens Brueckner, Katja Tonisch, Oliver Ambacher, Volker Cimalla

Journal:

physica status solidi (b)

Year:

2010

Language:

english

File:

PDF, 1.02 MB

english, 2010

21

Piezoelectric properties of thin AlN layers for MEMS application determined by piezoresponse force microscopy

K. Tonisch, V. Cimalla, Ch. Foerster, D. Dontsov, O. Ambacher

Journal:

physica status solidi (c)

Year:

2006

Language:

english

File:

PDF, 232 KB

english, 2006

22

Fully unstrained GaN on sacrificial AlN layers by nano-heteroepitaxy

K. Tonisch, V. Cimalla, F. Niebelschütz, H. Romanus, M. Eickhoff, O. Ambacher

Journal:

physica status solidi (c)

Year:

2007

Language:

english

File:

PDF, 354 KB

english, 2007

23

Piezoelectric actuation of all-nitride MEMS

K. Tonisch, C. Buchheim, F. Niebelschütz, M. Donahue, R. Goldhahn, V. Cimalla, O. Ambacher

Journal:

physica status solidi (c)

Year:

2008

Language:

english

File:

PDF, 502 KB

english, 2008

24

AlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications

F. Niebelschütz, V. Cimalla, K. Tonisch, Ch. Haupt, K. Brückner, R. Stephan, M. Hein, O. Ambacher

Journal:

physica status solidi (c)

Year:

2008

Language:

english

File:

PDF, 180 KB

english, 2008

25

Piezoelectric actuated epitaxially grown AlGaN/GaN-resonators

F. Niebelschuetz, K. Brueckner, K. Tonisch, R. Stephan, V. Cimalla, O. Ambacher, M. A. Hein

Journal:

physica status solidi (c)

Year:

2010

Language:

english

File:

PDF, 204 KB

english, 2010

26

Residual stress measurements and mechanical properties of AlN thin films as ultra-sensitive materials for nanoelectromechanical systems

Grieseler, R., Klaus, J., Stubenrauch, M., Tonisch, K., Michael, S., Pezoldt, J., Schaaf, P.

Journal:

Philosophical Magazine

Year:

2012

Language:

english

File:

PDF, 1.04 MB

english, 2012

27

Electric field distribution in GaN/AlGaN/GaN heterostructures with two-dimensional electron and hole gas

Buchheim, C., Goldhahn, R., Gobsch, G., Tonisch, K., Cimalla, V., Niebelschutz, F., Ambacher, O.

Journal:

Applied Physics Letters

Year:

2008

Language:

english

File:

PDF, 558 KB

english, 2008

28

Structural and photoconducting properties of MBE and MOCVD grown III-nitride double-heterostructures

Hauguth-Frank, Sindy, Lebedev, Vadim, Tonisch, Katja, Romanus, Henry, Kups, Thomas, Büchner, Hans-Joachim, Jäger, Gerd, Ambacher, Oliver, Schober, Andreas

Journal:

MRS Proceedings

Year:

2008

Language:

english

File:

PDF, 1.85 MB

english, 2008

29

Electronic structure of GaN(0001)-2 × 2 thin films grown by PAMBE

R. Gutt, P. Lorenz, K. Tonisch, M. Himmerlich, J. A. Schaefer, S. Krischok

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2008

Language:

english

File:

PDF, 205 KB

english, 2008

30

2H-AlGaN/GaN HEMTs on 3C-SiC(111)/Si(111) Substrates

Tonisch, Katja, Jatal, Wael, Granzner, Ralf, Kittler, Mario, Baumann, Uwe, Schwierz, Frank, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 567 KB

english, 2010

31

Coalescence aspects of III-nitride epitaxy

Lebedev, V., Tonisch, K., NiebelschuÌtz, F., Cimalla, V., Cengher, D., Cimalla, I., Mauder, Ch., Hauguth, S., Ambacher, O., Morales, F. M., Lozano, J. G., GonzaÌlez, D.

Journal:

Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 1.73 MB

english, 2007

32

[IEEE 2007 IEEE Sensors - Atlanta, GA, USA (2007.10.28-2007.10.31)] 2007 IEEE Sensors - Gas Pressure Sensing Based on MEMS Resonators

Bruckner, K., Cimalla, V., Niebelschutz, F., Stephan, R., Tonisch, K., Ambacher, O., Hein, M. A.

Year:

2007

Language:

english

File:

PDF, 909 KB

english, 2007

33

Isotropic Etching of SiC

Stauden, Thomas, Niebelschütz, Florentina, Tonisch, Katja, Cimalla, Volker, Ecke, Gernot, Haupt, Christian, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 580 KB

english, 2009

34

AlGaN based MEMS structures

Hähnlein, Bernd, Tonisch, Katja, Ecke, Gernot, Grieseler, Rolf, Michael, Steffen, Schaaf, Peter, Pezoldt, Jörg

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 389 KB

english, 2014

35

Piezoelectric actuation of (GaN/)AlGaN/GaN heterostructures

Tonisch, K., Buchheim, C., Niebelschütz, F., Schober, A., Gobsch, G., Cimalla, V., Ambacher, O., Goldhahn, R.

Journal:

Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 761 KB

english, 2008

36

[IEEE 2008 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) - Sydney, Australia (2008.07.28-2008.08.1)] 2008 Conference on Optoelectronic and Microelectronic Materials and Devices - Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication

Niebelschutz, F., Pezoldt, J., Stauden, T., Cimalla, V., Tonisch, K., Bruckner, K., Hein, M., Ambacher, O., Schober, A.

Year:

2008

Language:

english

File:

PDF, 199 KB

english, 2008

37

Strain- and pressure-dependent RF response of microelectromechanical resonators for sensing applications

Brueckner, K, Cimalla, V, Niebelschütz, F, Stephan, R, Tonisch, K, Ambacher, O, Hein, M A

Journal:

Journal of Micromechanics and Microengineering

Year:

2007

Language:

english

File:

PDF, 403 KB

english, 2007

38

[IEEE 2008 26th International Conference on Microelectronics (MIEL 2008) - Nis, Serbia and Montenegro (2008.05.11-2008.05.14)] 2008 26th International Conference on Microelectronics - The role of Ti/A1 ratio in nanolayered ohmic contacts for GaN/AlGaN HEMTs

Kolaklieva, L., Kakanakov, R., Cimalla, V., Maroldt, St., Niebelschutz, F., Tonisch, K., Ambacher, O.

Year:

2008

Language:

english

File:

PDF, 390 KB

english, 2008

39

[IEEE 2009 10th International Conferene on Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Delft, The Netherlands (2009.04.26-2009.04.29)] EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements

Michael, S., Brueckner, K., Niebelschuetz, F., Tonisch, K., Schaffel, Ch.

Year:

2009

Language:

english

File:

PDF, 287 KB

english, 2009

40

Sensing applications of micro- and nanoelectromechanical resonators

Niebelschütz, F, Cimalla, V, Brückner, K, Stephan, R, Tonisch, K, Hein, M A, Ambacher, O

Journal:

Proceedings of the Institution of Mechanical Engineers Part N Journal of Nanoengineering and Nanosystems

Year:

2007

Language:

english

File:

PDF, 551 KB

english, 2007

41

[IEEE 2005 European Microwave Conference - Paris, France (2005.10.4-2005.10.6)] 2005 European Microwave Conference - Electromechanical resonances of SiC and AlN beams under ambient conditions

Brueckner, K., Forster, Ch., Tonisch, K., Cimalla, V., Ambacher, O., Stephan, R., Blau, K., Hein, M.A.

Year:

2005

Language:

english

File:

PDF, 917 KB

english, 2005

42

Pulsed mode operation of strained microelectromechanical resonators in air

Cimalla, V., Foerster, Ch., Will, F., Tonisch, K., Brueckner, K., Stephan, R., Hein, M. E., Ambacher, O., Aperathitis, E.

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 556 KB

english, 2006

43

[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Resonant Piezoelectric ALGaN/GaN MEMS Sensors in Longitudinal Mode Operation

Brueckner, K., Niebelschuetz, F., Tonisch, K., Stephan, R., Cimalla, V., Ambacher, O., Hein, M.A.

Year:

2009

Language:

english

File:

PDF, 3.21 MB

english, 2009

44

Suspended nanowire web

Cimalla, Volker, Stubenrauch, Mike, Weise, Frank, Fischer, Michael, Tonisch, Katja, Hoffmann, Martin, Ambacher, Oliver

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 532 KB

english, 2007

45

Work function analysis of GaN-based lateral polarity structures by Auger electron energy measurements

Niebelschütz, M., Ecke, G., Cimalla, V., Tonisch, K., Ambacher, O.

Journal:

Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 498 KB

english, 2006

46

Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators

Brueckner, K., Niebelschuetz, F., Tonisch, K., Michael, S., Dadgar, A., Krost, A., Cimalla, V., Ambacher, O., Stephan, R., Hein, M. A.

Journal:

Applied Physics Letters

Year:

2008

Language:

english

File:

PDF, 586 KB

english, 2008

47

Vertical design of cubic GaN-based high electron mobility transistors

Granzner, R., Tschumak, E., Kittler, M., Tonisch, K., Jatal, W., Pezoldt, J., As, D., Schwierz, F.

Journal:

Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 1.34 MB

english, 2011

48

Structural studies of single crystalline In[sub 2]O[sub 3] films epitaxially grown on InN(0001)

Wang, Ch. Y., Lebedev, V., Cimalla, V., Kups, Th., Tonisch, K., Ambacher, O.

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 654 KB

english, 2007

49

High-Frequency Performance of GaN High-Electron Mobility Transistors on 3C-SiC/Si Substrates With Au-Free Ohmic Contacts

Jatal, Wael, Baumann, Uwe, Tonisch, Katja, Schwierz, Frank, Pezoldt, Jorg

Journal:

IEEE Electron Device Letters

Year:

2015

Language:

english

File:

PDF, 253 KB

english, 2015

50

SiC/Si Pseudosubstrates for AlGaN Nanoelectronic Devices

Hiller, Lars, Tonisch, Katja, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 670 KB

english, 2013

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